Kofloc 3660 Series Mass Flow Controller

Kofloc 3660 Series Mass Flow Controller
Model 3660 Series Mass Flow Controller has been developed centering the focus on compactness and low cost and is being acclaimed by a wide range of users for diverse applications, including from laboratory research and development activities to the user as a standard mass flow control model for various types of analyzers and vacuum devices in the production line. Varieties of derived models and options are available.


  • High reliability ensured using a solenoid actuator
  • Equipped with an advanced flow sensor of constant-current temperature difference detection type to ensure high-speed response
  • Low differential pressure type control available for combustible gases (LP option)
  • Use of a normally closed valve to ensure safety


Flow range (N2 equivalent, 20°C/1 atm
10 SCCM–20 SLM (freely
30 SLM–100 SLM (freely
Thermal mass flow sensor
Valve type
Proportional solenoid valve (closed when not energized)
Control range
2–100% (F.S.)
5–100% (F.S.)
2 sec. or less (0–100% within
±2% typical)
3 sec. or less (0–100% within
±2% typical)
±1.0% F.S. (25°C)
±1.5% F.S. (25°C)
Temperature coefficient
±0.1 F.S./°C (15–35°C)
±0.2 F.S./°C (15–35°C)
Operating differential
F.S. ≤ 5 SLM: 50–300 kPa (G)
F.S. ≤ 50 SLM: 150–300 kPa (G)
F.S. > 100 SLM: 50–300 kPa (G)
F.S. > 50 SLM: 200–300 kPa (G)
Option: Medium differential pressure (MP) and low differential pressure (LP) specifications are available.
Allowable operating pressure
500 kPa (G) or less
Proof pressure
980 kPa (G)
Leak rate
1 × 10-8 Pa·m3/s or less (excluding permeation of He)
Allowable ambient temperature
Allowable ambient humidity
10–90% (No condensation allowed)
Materials of parts in
contact with gases
Body: SUS316
Valve seat: FKM (option: CR or NBR)
Sealing: FKM (option: CR or NBR)
Electric connection
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate input signals
0–5 VDC (Input impedance: 1 MΩ or more)
Flow rate output signals
0–5 VDC (External load resistance: 250 kΩ or more)
Required power supply
+15 VDC (±5%) 100 mA, −15 VDC (±5%) 250 mA
Joint (Main unit bore)
Standard: 1/4SWL
Option: 1/8SWL 1/4VCR RC1/4, etc
Standard: 3/8SWL
Option: 1/2SWL 3/8VCR RC3/8, etc.
Approx. 1000 g
Approx. 1500 g

Specifications relating to the flow range (e.g., flow range, accuracy, and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.

Datasheet:Kofloc 3660 Series