Kofloc 3660 Series Mass Flow Controller

Model 3660 Series Mass Flow Controller has been developed centering the focus on compactness and low cost and is being acclaimed by a wide range of users for diverse applications, including from laboratory research and development activities to the user as a standard mass flow control model for various types of analyzers and vacuum devices in the production line. Varieties of derived models and options are available.

Feature

• High reliability ensured using a solenoid actuator
• Equipped with an advanced flow sensor of constant-current temperature difference detection type to ensure high-speed response
• Low differential pressure type control available for combustible gases (LP option)
• Use of a normally closed valve to ensure safety

Specification

Model	3660	3665
Flow range (N2 equivalent, 20°C/1 atm	10 SCCM–20 SLM (freely selectable)	30 SLM–100 SLM (freely selectable)
Sensor	Thermal mass flow sensor
Valve type	Proportional solenoid valve (closed when not energized)
Control range	2–100% (F.S.)	5–100% (F.S.)
Response	2 sec. or less (0–100% within ±2% typical)	3 sec. or less (0–100% within ±2% typical)
Accuracy	±1.0% F.S. (25°C)	±1.5% F.S. (25°C)
Temperature coefficient	±0.1 F.S./°C (15–35°C)	±0.2 F.S./°C (15–35°C)
Repeatability	±0.5%F.S.
Operating differential pressure	F.S. ≤ 5 SLM: 50–300 kPa (G)	F.S. ≤ 50 SLM: 150–300 kPa (G)
	F.S. > 100 SLM: 50–300 kPa (G)	F.S. > 50 SLM: 200–300 kPa (G)
	Option: Medium differential pressure (MP) and low differential pressure (LP) specifications are available.
Allowable operating pressure	500 kPa (G) or less
Proof pressure	980 kPa (G)
Leak rate	1 × 10-8 Pa·m3/s or less (excluding permeation of He)
Allowable ambient temperature	5–45°C
Allowable ambient humidity	10–90% (No condensation allowed)
Materials of parts in contact with gases	Body: SUS316
	Valve seat: FKM (option: CR or NBR)
	Sealing: FKM (option: CR or NBR)
Electric connection	Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate input signals	0–5 VDC (Input impedance: 1 MΩ or more)
Flow rate output signals	0–5 VDC (External load resistance: 250 kΩ or more)
Required power supply	+15 VDC (±5%) 100 mA, −15 VDC (±5%) 250 mA
Joint (Main unit bore)	Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc	Standard: 3/8SWL Option: 1/2SWL 3/8VCR RC3/8, etc.
Weight	Approx. 1000 g	Approx. 1500 g

Note
Specifications relating to the flow range (e.g., flow range, accuracy, and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.

Datasheet:Kofloc 3660 Series