This mass flow controller/meter driven by 24VDC power supply has been developed as a successor of the MODEL 8300. The viewpoint change function of the display unit and the pattern
setting function are unique to this model, and noise resistance has been
improved dramatically. A sister model with a detachable display and
setting unit is also available.
(*1)Only for the mass flow controller.
- The high-lift actuator allows this compact model to control a large flow rate.
- Equipped with a display and setting unit, this model can be operated by the 24VDC power supply.
- The RS232C/RS485 communication function and integration function are provided as standard equipment.
- The 14-bit converter permits to display and operation in 4-1/2 digits.
- Control of the flow rate of inflammable gas is possible because the heat generating part of the sensor is not exposed to the gas.
- There are no limitations to the mounting position that may be employed.
- In addition to the SV setting, five other patterns can be set.
- Auto zero and auto close functions are also standard.
Specification
ITEM | 8500MC/MM | 8550MC/MM |
Flow range | 10SCCM〜20SLM | 30SLM〜100SLM |
(N2 equivalent 20℃/1ATM) | (freely selectable) | (freely selectable) |
Sensor type | Thermal sensor | |
Valve type(*1) | Normally closed proportional solenoid valve | |
Control range(*1) | 2〜100%(F.S.) | 5〜100%(F.S.) |
Response(*1) | ≤2sec | ≤3sec |
(within±2%F.S) | (within±2%F.S.) | |
Accuracy | ±1.0%F.S.(25℃) | ±1.5%F.S.(25℃) |
Temperature coefficient | ±0.1F.S./℃(15〜35℃) | ±0.2F.S./℃(15〜35℃) |
Repeatability | ±0.5%F.S. | |
Operating differential pressure (*1) |
F.S.≤5SLM 50〜300kPa(G) | F.S.≤50SLM 150〜300kPa(G) |
F.S.>5SLM 100〜300kPa(G) | F.S.>50SLM 200〜300kPa(G) | |
Option:Medium differential pressure (MP), low differential pressure (LP) specifications are available | ||
Allowable operating pressure(*1) | 500kPa(G) or less | |
Proof pressure | 980kPa(G) | |
Leak rate | ≤1×10−8Pa・㎥/s(excluding permeation of He) | |
Allowable operating temperature | 5〜45℃ | |
Allowable operating humidity | 10〜90%RH(No condensation allowed) | |
Materials of the gas contact part | Body: SUS316 | |
Valve seat : FKM(option: CR or NBR) | ||
Sealing : FKM(option: CR or NBR) | ||
Electrical connection | Dsub half-pitch 20pin DX10M−20S(HRS) | |
Flow rate setting signal | 0〜5VDC(input impedance 100kΩ or more) | |
(*1) | or 4〜20mA selectable | |
Flow rate output signal | 0〜5VDC(external load resistance 250kΩ or more) or | |
4〜20mA (external load resistance 300Ω or less)selectable | ||
Communication | RS232C(3 wire)or RS485(3 wire) selectable | |
Other functions | Instantaneous flow rate・integrated flow rate display ( 7-segment 4-digit LED | |
display accuracy ±1% integrated display 0000〜9999MAX), | ||
Alarm output(NPN open collector output 2 points | ||
Max DC35V 50mA), pattern setting(5 pattern) function | ||
Required power supply | 24VDC±10%(ripple 5%) current consumption 300mA max | |
Joint | Standard 1/4F900(9/16-18UNF) | Standard 3/8F900(9/16−18UNF) |
(Main unit bore) | Option 1/8F900, 1/4UJR, | Option 1/2F900, 3/8UJR, |
Rc1/4 etc. | Rc3/8 etc. | |
Weight | Approx. 1200g | Approx. 1500g |
(*1)Only for the mass flow controller.
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