Fcon 1000 Series Analog Mass Flow Controller

Feature :

• It is an analog model specializing in the basic functions of the mass flow controller.
• Improved performance and reliability by basic functions pursuing original technology.
• Two types of Control Power Supply, Floor-standing "PA01" and Panel Mount "PA01P".
• Compact size.
• The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of an interval).
• Input & Output Signal： Analog (0～5VDC)
• To control the mass flow controller, a control power supply and a signal cable are required.

Specification :

Mass Flow Controller

C1005

C1020

C1030/C1050

C1100

Mass Flow Meter

M1005

M1020

M1030/M1050

-

Flow range (N2equivalent)

10,20,30,50,100,200,300,500SCCM1,2,3,5SLM

10,20SLM

30,50SLM

100LM

Gases

Various Gases (Please consult about corrosive gas)

Air, N2, Ar, H2, CO2, O2, He

Air, N2

Valve type

NC: Normally Close (Excluding Mass Flow Meter)

Flow rate control range

5-100％ F.S (Excluding Mass Flow Meter)

Accuracy

±2％ F.S (Accuracy guaranteed between 15-35℃)

Setting signal

0.25-5VDC (excluding Mass Flow Meter)

Output signal

0-5VDC

Repeatability

±0.2％ F.S

±0.5％ F.S

Response

≦6sec

≦15sec

Operating differential pressure

50-300KPa

200-300KPa

Pressure resistance

1MPa(G)

Operating temperature

5-50℃, ≦85％RH (Scope of accuracy guarantee: 15-35℃)

Leak Integrity

1×10-7Pa･m3/sec He

Mounting attitude

Free

Drive power source

+15VDC：60mA、-15VDC：150mA

Communication

Analog: 0-5VDC

Wetted surface material

SUS316, PTFE, Fluoro-Rubber

Seal material

Fluoro-Rubber

Actuator system

Thermal (excluding Mass Flow Meter)

Surface treatment

Machined finish

Standard fitting

1/4in.SWL (equivalent), One-touch fittings, 　※ For other fittings, please contact us.

Dimension :

Order Code :

  

Reference: www.fcon-inc.jp