
Feature
- It is an analog model specializing the basic functions of the mass flow controller.
- Improved performance and reliability by basic functions pursuing original technology.
- Two type of Control Power Supply, Floor-standing "PA01" and Panel Mount "PA01P".
- Compact size.
- The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
- Input & Output Signal : Analog (0~5VDC)
- To control the mass flow controller, a control power supply and a signal cable are required.
Spesification
Mass Flow Controller | C1005 | C1020 | C1030/C1050 | C1100 |
Mass Flow Meter | M1005 | M1020 | M1030/M1050 | - |
Flow range (N2equivalent) | 10,20,30,50,100,200,300,500SCCM 1,2,3,5SLM | 10,20SLM | 30,50SLM | 100LM |
Gases | Various Gases (Please consult about corrosive gas) | Air, N2, Ar, H2, CO2, O2, He | Air, N2 | |
Valve type | NC : Normally Close (Excluding Mass Flow Meter) | |||
Flow rate control range | 5-100% F.S (Excluding Mass Flow Meter) | |||
Accuracy | ±2% F.S (Accuracy guaranteed between 15-35℃) | |||
Setting signal | 0.25-5VDC (excluding Mass Flow Meter) | |||
Output signal | 0-5VDC | |||
Repeatability | ±0.2% F.S | ±0.5% F.S | ||
Response | ≦6sec | ≦15sec | ||
Operating differential pressure | 50-300KPa | 200-300KPa | ||
Pressure resistance | 1MPa(G) | |||
Operating temperature | 5-50℃, ≦85%RH (Scope of accuracy guarantee : 15-35℃) | |||
Leak integrity | 1×10-7Pa・m3/sec He | |||
Mounting attitude | Free | |||
Drive power source | +15VDC:60mA、-15VDC:150mA | |||
Communication | Analog : 0-5VDC | |||
Wetted surface material | SUS316, PTFE, Fluoro-Rubber | |||
Seal material | Fluoro-Rubber | |||
Actuator system | Thermal (excluding Mass Flow Meter) | |||
Surface treatment | Machined finish | |||
Standard fitting | 1/4in.SWL (equivalent), One-touch ļ¬ttings, ※ For other fitting, please contact us. |
Another Article: |
Dimension
Order Code
Reference : www.fcon-inc.jp
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