Fcon 1000 Series Analog Mass Flow Controller

Feature

• It is an analog model specializing the basic functions of the mass flow controller.
• Improved performance and reliability by basic functions pursuing original technology.
• Two type of Control Power Supply, Floor-standing "PA01" and Panel Mount "PA01P".
• Compact size.
• The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
• Input & Output Signal ： Analog (0～5VDC)
• To control the mass flow controller, a control power supply and a signal cable are required.

Spesification

Mass Flow Controller	C1005	C1020	C1030/C1050	C1100
Mass Flow Meter	M1005	M1020	M1030/M1050	-
Flow range (N2equivalent)	10,20,30,50,100,200,300,500SCCM 1,2,3,5SLM	10,20SLM	30,50SLM	100LM
Gases	Various Gases (Please consult about corrosive gas)		Air, N2, Ar, H2, CO2, O2, He	Air, N2
Valve type	NC : Normally Close (Excluding Mass Flow Meter)
Flow rate control range	5-100％ F.S (Excluding Mass Flow Meter)
Accuracy	±2％ F.S (Accuracy guaranteed between 15-35℃)
Setting signal	0.25-5VDC (excluding Mass Flow Meter)
Output signal	0-5VDC
Repeatability	±0.2％ F.S			±0.5％ F.S
Response	≦6sec			≦15sec
Operating differential pressure	50-300KPa		200-300KPa
Pressure resistance	1MPa(G)
Operating temperature	5-50℃, ≦85％RH (Scope of accuracy guarantee : 15-35℃)
Leak integrity	1×10-7Pa･m3/sec He
Mounting attitude	Free
Drive power source	+15VDC：60mA、-15VDC：150mA
Communication	Analog : 0-5VDC
Wetted surface material	SUS316, PTFE, Fluoro-Rubber
Seal material	Fluoro-Rubber
Actuator system	Thermal (excluding Mass Flow Meter)
Surface treatment	Machined finish
Standard fitting	1/4in.SWL (equivalent), One-touch fittings, 　※ For other fitting, please contact us.

 

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Dimension

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Reference : www.fcon-inc.jp