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Kofloc High Grade Metal Flow Controllers Model 5100 Series

High Grade Metal Flow Controllers
MODEL 5100 SERIES


Model 5100 Series Mass Flow Controller/Meter features weldless structure, metal seals, accurac y of ≤±1%, response of ≤±1 second and other basic performance con-ditions required for semiconductor process control, and additionally, has achieved a significant price reduction.

Features
- High accuracy and high response are achieved by the flow sen-sor with temperature- following current difference detection.
- A normally-closed solenoid valve is employed.
- A low leak rate is achieved by the weldless structure and metalseal.
- The dead volume is reduced thanks to the diaphragm seat valve.-
- The face-to-face and body dimensions and the wiring tie-inpoints are designed to facilitate replacement of devices made by other companies. 

Standard Specifications
-Flow range(N2 equivalents, 06 ℃/1 atm): 1 SCCM – 20 SLM (The conditions are freely selectable)

-Sensor : Thermal mass flow sensor

-Valve type: Proportional solenoid valve (closed when not energized)

-Control range: 2 – 100% (Porto)

-Response: 1 sec. or less (0 – 100% within ± 2% typical)

-Accuracy: ± 1% of Porto (Accuracy guaranteed at 15-35 ℃)

-Repeatability: ± 0.2% of Porto

-Operating differential pressurePorto:
  * ≤ 5 SLM: 50 – 300 kPa
  * Porto 5 > SLM: 100 – 1000 kPa
  * Option: Low differential pressure (LP) specification is available depending on conditions.

-Allowable operating pressure: 300 kPa (G) or less

- Pressure-Proof: 980 kPa (G)

-Leak rate: 1 × 10-11 Pa • m3/s or less

-Allowable ambient temperature: 0-50 ℃

-Allowable ambient humidity: 10 & ndAsh; 90% (No condensation allowed)

-Materials of the parts in contact with gases:
  * Body: SUS316L
  * Diaphragm:
  * Valve seat: PTFE
  * Sealing: SUS316L, Ni, Au
  * Option: SUS seal (SU), inner surface polish (KP)

-Electric connection: 9-pin Dsub connector as per Standard KFC (Compliant with SEMI Standard)

-Flow rate input signals: 0-5 VDC (Input impedance: 1 MΩ or more)

-Flow rate output signals: 0-5 VDC (External load resistance: 250 kΩ or more)

-Required power supply: +15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA

- Joint (Main unit bore) : Standard: 1/4 VCR equivalent Option: 1/4 SWL

- Weight : Approx. 1000 g
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