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Kofloc Flowmeter with Valve RK1500 Series

Flowmeter with Bellows Needle Valve (for Low-leak Flow Measurement and Control)

The Model RK1500 Series Flowmeter is equipped with a bellows seal type needle valve so that it can withstand high vacuum, high pressure, high temperature and toxic gases.

Feature

  • High reliability against leak is ensured because 100% leak test is conducted before shipping, using a helium leak detector.
  • Bellows seal type needle valve perfectly eliminates leak from the valve stem.
  • Superior corrosion resistance is ensured by using SUS 316,FKM, fluorocarbon resin and Pyrex glass only for wetted parts and those which are exposed to other fluids.
  • Enhanced stability and repeatability are ensured using a flowmeter consisting of a precision-formed try-flat, rib-guided glass tube and ultra-precision ball float in combination with a sophisticated needle valve.

Applications

  • For vacuum systems
  • For semiconductor manufacturing lines

Specifications


GasesLiquids
Fluids Air, N2, O2, H2, He, Ar, and CO2 (Calibration by actual gas)
For other gases, consultation is necessary regarding whether
conversion conditions　or calibration by actual gas is to be used.
* Optional: Scale indicating two types of fluids		 Standard fluid: Water
For other liquids, consultation is necessary regarding whether
conversion conditions　or calibration by actual liquid is to be used.
Flow range 0.5-5 ML/MIN to 3-30 L/MIN (See the Capacity Table below.)
* Optional: 0.5-3 ML/MIN		 0.5-5 ML/MIN to 0.1-1 L/MIN (See the Capacity Table below.)
* Optional: 0.5-3 ML/MIN
Accuracy FS±2% (Measurement point)
* Optional: FS±1% (Measurement point)		 FS±2% (Measurement point)
Proof
pressure		 1.0 MPa for 100 ML/MIN or less
0.7 MPa for 5 L/MIN or less
0.5 MPa for 10 L/MIN or more		 1.0 MPa for 5 ML/MIN or less
0.7 MPa for 150 ML/MIN or less
0.5 MPa for 200 ML/MIN or more
Available
scale		 10:1 * Optional: 20:1
Materials SS
Body block SUS316
Tapered tube Pyrex®, glass
Packing FKM, fluorocarbon resin
Float Pyrex, SUS 316, glass
Protective
cover		 Acrylic resin
Temperature
resistance		 MAX60℃
Air
Max. flow rate 5 10 20 30 50 100 150 200 300 500 1 2 3 5 10 15 20 30
Total length　 ML/MIN ML/MIN ML/MIN ML/MIN ML/MIN ML/MIN ML/MIN ML/MIN ML/MIN ML/MIN L/MIN L/MIN L/MIN L/MIN L/MIN L/MIN L/MIN L/MIN
120mm ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○
150mm － ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○
200mm － － － － ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○
250mm － － － － － ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○
H2O
Max. flow rate 5 10 20 30 50 100 150 200 300 500 1
Total length　 ML/MIN ML/MIN ML/MIN ML/MIN ML/MIN ML/MIN ML/MIN ML/MIN ML/MIN ML/MIN L/MIN
120mm ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○
150mm ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○
200mm ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○
250mm○○○○○○○○○○○
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