Flowmeter With
Precision Needle Valve (for Accurate Flow Control)
MODEL RK1200 SERIES
This is a grade high precision float type flowmeter com-bined with a needle
valve capable of very accurate flow control. It is ideal for measurement and
control of minute flows.
Features
- Capable of controlling ultra-minute flows
- A needle valve incorporated to maximize precision control of flows
- Two types of valve arrangement available:at the top or bottom of the meter at
the user's choice
- Wide variations
Applications
- For integration into your equipment panel
- For gas devices to be used on the semiconductor manufacturing site
- For biotechnology industries
- For vacuum line control
Standard Specifications
- Fluids :
*Gases : Air, N2, O2, H2, He, Ar, and CO2 (Calibration by actual gas)
For other gases, consultation is necessary regarding
whether conversion conditions or calibration by actual
gas is to be used. * Optional: Scale indicating two types of fluids
*Liquids : Standard fluid: Water For other liquids, consultation
is necessary regarding whether conversion conditions or
calibration by actual liquid is to be used.
- Flow range :
*Gases : 0.5-5 ML/MIN to 3-30 L/MIN (See the Capacity Table below.)
Optional: 0.5-3 ML/MIN
*Liquids : 0.5-5 ML/MIN to 0.1-1 L/MIN (See the Capacity Table below.)
Optional: 0.5-3 ML/MIN
- Accuracy :
*FS±2% (Measurement point) * Optional: FS±1% (Measurement point)
*FS±2% (Measurement point)
- Proof pressure :
*Gases : 1.0 MPa for 100 ML/MIN or less ; 0.7 MPa for 5 L/MIN or less ;
0.5 MPa for 10 L/MIN or more
*Liquids : 1.0 MPa for 5 ML/MIN or less ; 0.7 MPa for 150 ML/MIN or less
; 0.5 MPa for 200 ML/MIN or more
- Available scale : 10:1 * Optional: 20:1
- Body block and some other components : *SS : SUS316
*BS : Brass
- Tapered tube : *SS & BS : Pyrex®, glass
- Packing : *SS : FKM
*BS : NBR
- Float : * SS & BS : Pyrex, SUS316, glass
- Protective cover : * SS & BS : Acrylic resin
- (Temperature resistance) : * SS & BS : MAX60°
- Connection :*SS & BS : Rc1/4(Standard); Rc1/8(Optional)