Features :
- The mass flow controller 1000 series and control power supply are all-in-one compact flow control units.
- It can be used by connecting the gas fitting and power outlet.
- The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of the interval).
- Input & Output Signal: Analog (0~5VDC).
- Equipped with monitor terminal for setting/output voltage on the back.
- This product is ideal for use on the desktop, space-saving.
- If you mount the main body and set the operation part in the panel cut part, it can be incorporated in various kinds of equipment.
- Compact and lightweight integral unit
- Easy flow Measuring / Controlling
- Flow rate display and setting functions
- SET / OUT switching function
- External output terminals are provided on the rear
Specifications :
|
Model |
CUBE MFC 1005 / 1020 / 1030 / 1050 / 1100 |
|
Gases |
Most gases (e.g., air, nitrogen, carbon dioxide, argon,
hydrogen, helium, methane, oxygen) |
|
Valve type |
Normally Open |
|
Flow range* |
10,20,30,50,100,200,300,500SCCM |
|
Flow rate control range |
5-100% F . S. |
|
Accuracy |
±2%F. S. ( Accuracy guaranteed between 15-35°C) |
|
Repeatability |
±0.2% F.S |
|
Response speed |
≦6sec |
|
Operating differential pressure |
50-300kPa (conform to built-in Mass flow controller
specification) |
|
Pressure Resistance |
1MPa (G) |
|
Leak Integrity |
1×10-7Pa•m3/ sec (He) |
|
Operating temperature |
5-50°C less than 85% RH |
|
Wetted surface material |
SUS316, PTFE, Fluoro-Rubber |
|
Seal material |
Fluoro-Rubber |
|
Setting signal |
0.25-5VDC |
|
Output signal |
0-5VDC |
|
Standard fitting** |
1/4in. SWL (equivalent), One-touch fittings |
|
Mass flow control |
10-turn potentiometer |
|
Display |
Instantaneous flow |
|
Input power |
AC100 - 240V |
|
Output terminal |
Setting the signal /Output signal |
* At F CON, flow rates (SCCM, S LM) are converted to values at 0ÂșC, 1 01.3kPa abs (1atm) for calibration.
* * For other fittings, please contact us.
Reference: https://inaparts.com/

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