DF-550C is now released as an
all-metal model of the high-performance digital mass flow controller
DF-250C Series. The metal sealed structure enables controlling the
measurement of corrosive gases such as semiconductor process gases.
*1 The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
*2 The flow rate units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm
*3 Guarantee for calibration gas: N2.
*4 Accuracy for calibration gas: N2, flow range (max. full scale).
*5 The operating differential pressure may differ depending on specifications.
Features
- Response improved to 1 sec or faster in all flow rate ranges thanks to a new solenoid
- The stainless steel seal supports high-reactive gases.
- Lineup ranging from 10 SCCM to 10 SLM
- Two communication ports enabling daisy-chaining
- RS-485 communication function installed as standard
- RoHS CE standard compliant
Specification
| Sensor type | Thermal sensor | ||
| Valve type | Normally closed proportional solenoid valve | ||
| Applicable gases*1 | N2, Air, H2, He, Ar, O2, CO2, etc. Gases not specifically mentioned here are subject to calibration for N2 equivalent.) |
||
| Flow range*2 | 10 SCCM to 10 SLM | ||
| Control range | 2 to 100% (F.S.) | ||
| Response*3 | Total flow rate control range ≤ 1 sec (within ±2% F.S.) | ||
| Accuracy*4 | ±1.0%F.S. | ||
| Repeatability | ±0.25%F.S. | ||
| Operating differential pressure*5 | 50 to 350 kPa (100 to 350 kPa for F.S. 10 SLM) | ||
| Inlet maximum pressure | 500kPa（G） | ||
| Proof pressure | 980kPa（G） | ||
| External leak rate | ≤ 1.0 x 10-11 Pa·m3/sec (He) | ||
| Temperature | Working temp. | 5 to 50℃ | |
| Accuracy guaranteed temp. | 15 to 35℃ | ||
| Allowable storage temp. | -10 to 60℃ | ||
| Allowable operating humidity | 10 to 90% RH (without dew condensation) | ||
| Materials of gas contact part | SUS316L, PTFE, and magnetic stainless steel | ||
| Electrical connection | D-sub 9-pin, KFC standard (SEMI standard compliant), RJ-45 modular jacks (two) | ||
| Flow rate setting signal | 0 to 5 V DC (input impedance approx. 1 MΩ) | ||
| Flow rate output signal | 0 to 5 V DC (load resistance 10 KΩ) | ||
| Digital communication | Address setting with RS485 rotary switch: up to 99 devices (9600 bps) | ||
| Required power supply (DC) | +15 V DC (±5%), 150 mA; -15 V DC (±5%), 150 mA | ||
| Joint | 1/4 VCR or equivalent | ||
| Mounting posture | Horizontal installation recommended. | ||
| Weight | Approx. 1100 g | ||
*1 The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
*2 The flow rate units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm
*3 Guarantee for calibration gas: N2.
*4 Accuracy for calibration gas: N2, flow range (max. full scale).
*5 The operating differential pressure may differ depending on specifications.
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