Feature :
- Built-in display setting unit, setting control is possible only with the main unit.
- The driving power is DC24V single power supply (500mAor more adapter can be used).
- Compact size to realize the small size and space-saving.
- Simple installation of various equipment.
- Digital communication: RS485 communication.
- Analog signal: 0-5V and 4-20mA can be switched.
- Equipped with an abnormal flow rate alarm function.
- Equipped with accumulation function.
- Digital Control Application Software.
Specifications :
Mass Flow Controller |
C2005 |
C2020 |
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Mass Flow Meter |
M2005 |
M2020 |
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Flow range (N2equivalent) |
10 SCCM 5 SLM |
10SLM |
20SLM |
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Gases |
Various Gases (Please consult
about corrosive gas) |
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Valve type |
NC: Normally Closed (Excluding
Mass Flow Meter) |
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Flow rate control range |
2-100% F.S (Excluding Mass Flow Meter) |
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Accuracy |
±1% F.S (Accuracy guaranteed between 15-35℃) |
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Setting signal |
Setting section of the main unit,
Digital: RS485, |
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Output signal |
Main unit display: |
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Repeatability |
±0.2% F.S |
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Response |
≦2sec |
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Operating differential pressure |
50-300KPa |
100-300KPa |
200-300KPa |
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Pressure resistance |
1MPa(G) |
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Operating temperature |
5-50℃, ≦85%RH (Scope of accuracy guarantee: 15-35℃) |
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Leak integrity |
1×10-7Pa・m3/sec He |
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Mounting attitude |
Free |
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Drive power source |
+24VDC: ≧500mA |
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Communication |
RS485, Analog: 0-5V and 4-20mA can
be switched |
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Wetted surface material |
SUS316, PTFE, Fluoro-Rubber |
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Seal material |
Fluoro-Rubber |
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Actuator system |
Solenoid (excluding Mass Flow
Meter) |
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Surface treatment |
Machined finish |
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Standard fitting |
1/4in.SWL (equivalent), One-touch
ļ¬ttings, |
Dimension :
Order Code :
Reference: www.fcon-inc.jp
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