Feature
- Built-in display setting unit, setting control is possible only with the main unit.
- Driving power is DC24V single power supply (500mAor more adapter can be used).
- Compact size to realize the small size and space-saving.
- Simple installation to various equipment.
- Digital communication: RS485 communication.
- Analog signal: 0-5V and 4-20mA can be switched.
- Equipped with an abnormal flow rate alarm function.
- Equipped with accumulation function.
- Digital Control Application Software.
Specifications
Mass Flow Controller | C2005 | C2020 | ||
Mass Flow Meter | M2005 | M2020 | ||
Flow range (N2equivalent) | 10 SCCM 5 SLM | 10SLM | 20SLM | |
Gases | Various Gases (Please consult about corrosive gas) | |||
Valve type | NC : Normally Closed (Excluding Mass Flow Meter) | |||
Flow rate control range | 2-100% F.S (Excluding Mass Flow Meter) | |||
Accuracy | ±1% F.S (Accuracy guaranteed between 15-35℃) | |||
Setting signal | Setting section of the main unit, Digital: RS485, Analog: 0-5V and 4.3-20mA can be switched (Excluding Mass Flow Meter) | |||
Output signal | Main unit display: 7 segments LED, Digital: RS485, Analog: 0-5V and 4-20mA can be switched | |||
Repeatability | ±0.2% F.S | |||
Response | ≦2sec | |||
Operating differential pressure | 50-300KPa | 100-300KPa | 200-300KPa | |
Pressure resistance | 1MPa(G) | |||
Operating temperature | 5-50℃, ≦85%RH (Scope of accuracy guarantee: 15-35℃) | |||
Leak integrity | 1×10-7Pa・m3/sec He | |||
Mounting attitude | Free | |||
Drive power source | +24VDC: ≧500mA | |||
Communication | RS485, Analog: 0-5V and 4-20mA can be switched | |||
Wetted surface material | SUS316, PTFE, Fluoro-Rubber | |||
Seal material | Fluoro-Rubber | |||
Actuator system | Solenoid (excluding Mass Flow Meter) | |||
Surface treatment | Machined finish | |||
Standard fitting | 1/4in.SWL (equivalent), One-touch ļ¬ttings, ※ For another fitting, please contact us. |
Another Article: |
Dimension
Order Code
Reference: www.fcon-inc.jp
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