Feature :
- CUBEGM-Xα Series (Buffer tank specification) is an all-in-one unit that has a Touch panel, PLC unit, Mass Flow Controller, Power supply, Valve, Check Valve Gas Mixer, and Buffer tank.
- Program operation: Program operation is possible by setting the flow rate and time of each line.
- Alarm function: An alarm sound is notified if an error occurs by any upper / lower limit setting of each line flow rate.
- The pressure in the buffer tank is constantly monitored, and when the pressure falls below a fixed pressure, gas is automatically supplied to the buffer tank at the set mixing ratio. (Automatic stop and automatic restart pressure are fixed values, so please inquire in advance.)
- Simply connect the piping to the INside and OUTside.
- Easy to move due to stoppered casters.
- [CUBEGM-Xα Series] is a device that supplies a mixed gas species of 2, 3, and 4 to set up and control any of the flow rates.
- Analog mass flow controller [1000 Series] is mounted as a standard feature.
- The mass flow controller, which flow control range is from 10SCCM to 50SLM, can be mounted as a standard. In other cases, please contact us.
- It can be reduced the cost when you use a Gas mixer than you purchase gas cylinders that have been prepared in the mixing ratio.
- It can be used for a wide range of applications such as analysis, environment, bio, packaging, medical, and gas welding.
- Applicable gases: Inert gas. (For more information, please contact us)
Specification :
Model |
CUBEGM-X Series |
||
Size |
CUBEGM-Xα2: W350×D400×H1100(mm) ※Except protrusion / In the
case of 10 L tank |
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Input power |
AC100-240V |
||
Current consumption |
About 125VA ※In the case of 3 mass flow
controllers equipped with |
||
Flow range (*1) |
≦50SLM(Total flow rate) |
||
Flow rate control range |
1 LINE: F.S.10SCCM~20SLM |
||
Flow rate control |
MFC : C1000 Series or FCST1000L
Series |
||
Flow rate output signals |
0-5VDC |
||
Operating differential pressure |
Conform to built-in mass flow
controller specification |
||
Pressure Resistance |
Conform to built-in mass flow
controller specification |
||
INLET, OUTLET Valve |
Solenoid Valve |
||
Leak Integrity |
≦5×10-7Pa・m3/sec He |
||
Pressure resistance |
0.5MPa |
||
Wetted surface material |
SUS316, PTFE, Fluoro-Rubber
(FCST1000L Series : |
||
Standard fitting |
1/4in.SWL (equivalent) ※For other fittings, please contact
us. |
||
Operating environment |
5-50℃,
30-80%RH
(Scope of accuracy guarantee: 15-35℃) |
||
Tank volume(*2) |
Touch panel operation |
||
Tank operating pressure |
0.49 MPa |
||
Mass flow control |
Touch panel operation |
||
Accessory |
AC cable(2m), User's manual,
Written Guarantee |
*1. At FCON, flow rates (SCCM, SLM) are converted to values at 0°C, 101.3kPa abs (1atm) for calibration.
*2. For other tank volumes please kindly discuss with us.
Reference: http://www.fcon-inc.jp
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