Feature
- CUBEGM-Xα Series (Buffer tank specification) is an all-in-one unit that has a Touch panel, PLC unit, Mass Flow Controller, Power supply, Valve, Check Valve Gas Mixer and Buffer tank.
- Program operation: Program operation is possible by setting the flow rate and time of each line.
- Alarm function: Alarm sound is notified if an error occurs by any upper / lower limit setting of each line flow rate.
- The pressure in the buffer tank is constantly monitored, and when the pressure falls below a fixed pressure, gas is automatically supplied to the buffer tank at the set mixing ratio. (Automatic stop and automatic restart pressure are fixed values, so please inquire in advance.)
- Simply connect the piping to the INside and OUTside.
- Easy to move due to stoppered casters.
- [CUBEGM-Xα Series] is a device that supplies a mixed gas species of 2, 3, 4 to set up and control to any of the flow rates.
- Analog mass flow controller [1000 Series] is mounted as a standard feature.
- The mass flow controller, which flow control range is from 10SCCM to 50SLM, can be mounted as a standard. In other cases, please contact us.
- It can be reduced the cost when you use a Gas mixer than you purchase gas cylinders that have been prepared in the mixing ratio.
- It can be used for a wide range of applications such as analysis, environment, bio, packaging, medical, gas welding.
- Applicable gases: Inert gas. (For more information, please contact us)
Specification
Model | CUBEGM-X Series |
---|---|
Size | CUBEGM-Xα2 : W350×D400×H1100(mm) ※Except protrusion / In the case of 10 L tank CUBEGM-Xα3 : W430×D400×H1100(mm) ※Except protrusion / In the case of 10 L tank CUBEGM-Xα4 : W510×D400×H1100(mm) ※Except protrusion / In the case of 10 L tank |
Input power | AC100-240V |
Current consumption | About 125VA ※In the case of 3 mass flow controllers equipped with |
Flow range (*1) | ≦50SLM(Total flow rate) |
Flow rate control range | 1 LINE: F.S.10SCCM~20SLM |
Flow rate control | MFC : C1000 Series or FCST1000L Series |
Flow rate output signals | 0-5VDC |
Operating differential pressure | Conform to built-in mass flow controller specification |
Pressure Resistance | Conform to built-in mass flow controller specification |
INLET, OUTLET Valve | Solenoid Valve |
Leak Integrity | ≦5×10-7Pa・m3/sec He |
Pressure resistance | 0.5MPa |
Wetted surface material | SUS316, PTFE, Fluoro-Rubber (FCST1000L Series: Magnetic stainless steel, Fluoro-Rubber or Chloroprene rubber) |
Standard fitting | 1/4in.SWL (equivalent) ※For other fittings, please contact us. |
Operating environment | 5-50℃, 30-80%RH (Scope of accuracy guarantee: 15-35℃) |
Tank volume(*2) | Touch panel operation |
Tank operating pressure | 0.49 MPa |
Mass flow control | Touch panel operation |
Accessory | AC cable(2m), User's manual, Written guarantee |
*1. At FCON, flow rates (SCCM, SLM) are converted to values at 0°C, 101.3kPa abs (1atm) for calibration.
*2. Other tank volumes please kindly discuss with us.
Reference: http://www.fcon-inc.jp
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