Kofloc 3660 Series Mass Flow Controller

Kofloc 3660 Series Mass Flow Controller

Model 3660 Series Mass Flow Controller has been developed centering the focus on compactness and low cost and is being acclaimed by a wide range of users for diverse applications, including from laboratory research and development activities to the user as a standard mass flow control model for various types of analyzers and vacuum devices in the production line. Varieties of derived models and options are available.


  • High reliability ensured using a solenoid actuator
  • Equipped with an advanced flow sensor of constant-current temperature difference detection type to ensure high-speed response
  • Low differential pressure type control available for combustible gases (LP option)
  • Use of a normally closed valve to ensure safety


Flow range (N2 equivalent, 20°C/1 atm10 SCCM–20 SLM (freely
30 SLM–100 SLM (freely
SensorThermal mass flow sensor
Valve typeProportional solenoid valve (closed when not energized)
Control range2–100% (F.S.)5–100% (F.S.)
Response2 sec. or less (0–100% within
±2% typical)
3 sec. or less (0–100% within
±2% typical)
Accuracy±1.0% F.S. (25°C)±1.5% F.S. (25°C)
Temperature coefficient±0.1 F.S./°C (15–35°C)±0.2 F.S./°C (15–35°C)
Operating differential
F.S. ≤ 5 SLM: 50–300 kPa (G)F.S. ≤ 50 SLM: 150–300 kPa (G)
F.S. > 100 SLM: 50–300 kPa (G)F.S. > 50 SLM: 200–300 kPa (G)
Option: Medium differential pressure (MP) and low differential pressure (LP) specifications are available.
Allowable operating pressure500 kPa (G) or less
Proof pressure980 kPa (G)
Leak rate1 × 10-8 Pa·m3/s or less (excluding permeation of He)
Allowable ambient temperature5–45°C
Allowable ambient humidity10–90% (No condensation allowed)
Materials of parts in
contact with gases
Body: SUS316
Valve seat: FKM (option: CR or NBR)
Sealing: FKM (option: CR or NBR)
Electric connectionDsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate input signals0–5 VDC (Input impedance: 1 MΩ or more)
Flow rate output signals0–5 VDC (External load resistance: 250 kΩ or more)
Required power supply+15 VDC (±5%) 100 mA, −15 VDC (±5%) 250 mA
Joint (Main unit bore)Standard: 1/4SWL
Option: 1/8SWL 1/4VCR RC1/4, etc
Standard: 3/8SWL
Option: 1/2SWL 3/8VCR RC3/8, etc.
WeightApprox. 1000 gApprox. 1500 g

Specifications relating to the flow range (e.g., flow range, accuracy, and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.

Datasheet:Kofloc 3660 Series