Kofloc DF-250C Series Digital Mass Flow Meter

 The DF-250 series is a high-performance digital mass flow controller with ≤1 sec response less than 50SLM specification. The series offers a large flow rate line-up up to 300SLM.

Feature

• Standard gases are calibrated with actual gas
• ~50SLM model offers a fast response of ≤1 sec
• 10sccm ~ 300SLM flow range line-up
• Communications functions installed as a standard feature(RS485)
• RoHS/CE Standard compliant

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Specification

Sensor type		Thermal sensor
Valve type		Normally closed proportional solenoid valve
Applicable gases*1		N2, Air, H2, He, Ar, O2, CO2, etc. (Gases not specifically mentioned here are subject to calibration for N2 equivalent.)		Air, N2
Flow range*2		10 SCCM to 10 SLM	20 to 50 SLM (20 to 30 SLM for CO2)	100, 150 SLM	200, 300 SLM
Control range		2 to 100% (F.S.)		5 to 100% (F.S.)
Response*3		Total flow rate control range ≤ 1 sec (within ±2% F.S.)		≤　 1.5 sec / ≤ 3 sec less than 10% (within ±2% F.S.)	≤　 2 sec (within ±2% F.S.)
Accuracy*4		±1.0% F.S.			±2.0% F.S
Repeatability		±0.25%F.S.			±0.5%F.S.
Operating differential pressure*5		50 to 300 kPa (100 to 300 kPa for Ar and CO2)	100 to 300 kPa (150 to 300 kPa for Ar and CO2)	150 to 350 kPa	200 SLM: 200 to 350 kPa 300 SLM: 250 to 350 kPa
Inlet maximum pressure		500kPa（G）
Proof pressure		980kPa（G）
External leak rate		≤1.0 x 10-8 Pa·m3/sec (He)		≤1.0 x 10-7 Pa·m3/sec (He)
Temperature	Working temp.	5 to 50℃
	Accuracy guaranteed temp.	15 to 35℃
	Allowable storage temp.	-10 to 60℃
Allowable operating humidity		10 to 90% RH (without dew condensation)
Materials of gas contact part		SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM
Electrical connection		D-sub 9-pin, KFC standard (SEMI standard compliant), RJ-45 modular jacks (two)			D-sub 9-pin , HR-10A (two)
Flow rate setting signal		0 to 5 V DC (input impedance: approx. 1 MΩ)
Flow rate output signal		0 to 5 V DC (load resistance 10 kΩ)
Digital communication		Address setting with RS485 rotary switch: up to 99 devices (9600 bps)
Required power supply (DC)		+15 V DC (±5%) : 150 mA -15 V DC (±5%) : 150 mA		+15 V DC (±5%) : 150 mA -15 V DC (±5%) : 250 mA	24 V DC (±10%) : 450 mA
Joint*6		1/4 F900 (standard), 1/4 UJR, Rc 1/4		1/2 SW (standard), 3/4 SW
Mounting posture		Horizontal installation recommended.
Weight*7		Approx. 850 g	Approx. 1000 g	Approx. 2250 g	Approx. 3500 g

*1 The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.

*2 Dedicated software is available to change gases or change the actual full scale (F.S.) within the range of 30 to 100% (30 to 80% for CO2 only) of the specified full scale.

*3 The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.

*4 Guarantee for calibration gas: N2.

*5 Accuracy for calibration gas: N2, flow range (max. full scale).

*6 The operating differential pressure may differ depending on specifications.

*7 Contact us for any other joints.

*8 Exclusive of the weight of joint