Kofloc EX-250S Series Digital Mass Flow Meter

 

Digital mass flow device which is adopted the own developed both stable high-speed thermal sensors and small proportional solenoid valves and is realized high accuracy and quick response with RS 485 communication in spite of compact.

Feature

• Lower cost but high accuracy measurement
• High-speed response and zero stability
• 0-5VDC or 4-20mA Input/output signal and +/-15VDC or 24VDC power supply
• Mediocrity D-sub 9pin
• Gases registered in EX-250S are usable by rotary-switch
  *Calculate the flow rate with conversion factor based onN2 gas
• RoHS compliance, CE marked

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Specification

Model		Mass Flow Controller	Mass Flow Meter
		EX-250SC	EX-250SM
Sensor type		Thermal sensor
Valve type		Normally closed proportional solenoid valve	-
Applicable gases（*1）		N2、Air、H2、He、Ar、O2、CO2 etc.
		(Gases not specifically mentioned here are subject to calibration for N2 equivalent.)
Flow range（*2）		10SCCM ～ 5SLM
Control（measure）range		2 ～ 100%(F.S.)
Response		≤ 1sec （within ± 2%F.S.）（*8）
Accuracy（*3）		± 1.0%F.S.
Repeatability		± 0.2%F.S.
Operating differential pressure（*4）		50 ～ 300kPa（Ar、CO2：１00kPa ～ 300kPa）	-
Inlet maximum pressure		500kPa（G）
Proof pressure		980kPa（G）
External leak rate（He）		≤ 1.0 × 10-8Pa・m3/sec
Temperature	Working temp.	5 ～ 50℃
	Accuracy guaranteed temp.	15 ～ 35℃
	Allowable storage temp.	-10 ～ 60℃
Allowable operating humidity		10 ～ 90%RH (without dew condensation)
Materials of a gas contact part		SUS316, SUS316L, magnetic stainless steel（*5）, PTFE, FKM
Electrical connection		Dsub 9pin KFC Standard（SEMI standard is compliant）
		HR-10A
Flow rate setting signal		0～5VDC(input impedance: approx. 1M Ω)	-
		or 4～20mA(input impedance: approx. 250 Ω)
Flow rate output signal		0 ～ 5VDC( load resistance ≧10k Ω)
		or 4 ～ 20mA( load resistance ≧500 Ω)
Digital communication		RS485　rotary-switch address setting
Required power supply (DC)		+15VDC( ± 5%)100mA , -15VDC（± 5%）150mA
		or +24VDC（± 10%） ≤180mA　 (MFM would be ≤100mA)
Joint（*6）		1/4F900（standard）
Mounting posture		Horizontal installation recommended.
Weight（*7）		Approx.500g	Approx.440g