EX-550 Series Mass Flow Controller & Meter
In comparison with conventional mechanical products, the mass flow measurement/control technology used in the EX-550 Series Mass Flow Meter and Controller extracts electrical signals directly from the flow without significantly influencing temperature or pressure. This allows for sophisticated and highly accurate flow measurement and control. This advanced technology is widely adopted in the manufacturing of semiconductors, liquid crystals, optical fibers, and other electronic devices. It is also crucial for gas supply in fuel cells, fuel gas control for burners, and various applications in the food, biotechnology, and experimental facilities sectors, as well as in production and inspection systems across numerous other industries.
---Features
- Metal Sealing Design: Ensures high integrity and reliability, especially crucial for sensitive gas handling applications.
- Cost-Effective with High Accuracy: Offers precise measurement capabilities at a competitive price point, providing excellent value.
- High-Speed Response and Zero Stability: Delivers rapid adjustments to flow changes and maintains a stable zero point, critical for consistent process control.
- Flexible Input/Output Signals: Supports both 0-5VDC and 4-20mA input/output signals, allowing for broad compatibility with various control systems.
- Versatile Power Supply Options: Can be powered by either +/-15VDC or 24VDC, offering adaptability to different power infrastructures.
- D-sub 9pin Connector: Utilizes a common D-sub 9-pin connector for straightforward electrical connections.
- Multi-Gas Compatibility via Rotary Switch: Pre-registered gases in the EX-550 can be easily selected using a rotary switch, simplifying gas management. Flow rates for other gases are calculated with a conversion factor based on N2 gas.
- RoHS Compliance & CE Marked: Adheres to environmental regulations and European safety standards, ensuring product quality and safety.
Specifications
| Model | Mass Flow Controller | Mass Flow Meter | |
|---|---|---|---|
| EX-550C | EX-550M | ||
| Sensor Type | Thermal sensor | ||
| Valve Type | Normally closed proportional solenoid valve | - | |
| Applicable Gases (*1) | N2, Air, H2, He, Ar, O2, CO2 etc. | ||
| (Gases not specifically mentioned here are subject to calibration for N2 equivalent.) | |||
| Flow Range (*2) | 10SCCM ~ 5SLM | ||
| Control (Measure) Range | 2 ~ 100% (F.S.) | ||
| Response | ≤ 1sec (within ± 2%F.S.) (*4) | ||
| Accuracy | ± 1.0%S.P. (25%F.S. ~ 100%F.S.), ± 0.25%F.S. (~ 25%F.S.) | ||
| Repeatability | ± 0.2%F.S. | ||
| Operating Differential Pressure (*3) | 50 ~ 300kPa (Ar, CO2: 100kPa ~ 300kPa) | - | |
| Inlet Maximum Pressure | 350kPa (G) | ||
| Proof Pressure | 980kPa (G) | ||
| External Leak Rate (He) | ≤ 1.0 × 10-11Pa·m3/sec | ||
| Temperature | Working Temp. | 5 ~ 50℃ | |
| Accuracy Guaranteed Temp. | 15 ~ 35℃ | ||
| Allowable Storage Temp. | -10 ~ 60℃ | ||
| Allowable Operating Humidity | 10 ~ 90%RH (without dew condensation) | ||
| Materials of Gas Contact Part | SUS316L, PTFE, Ni-Co | ||
| Electrical Connection | Dsub 9pin KFC Standard (SEMI standard compliant) | ||
| HR-10A × 2 | |||
| Flow Rate Setting Signal | 0~5VDC (input impedance: approx. 1M Ω) | - | |
| or 4~20mA (input impedance: approx. 250 Ω) | |||
| Flow Rate Output Signal | 0 ~ 5VDC (load resistance ≥10k Ω) | ||
| or 4 ~ 20mA (load resistance ≥500 Ω) | |||
| Digital Communication | RS485 rotary-switch address setting | ||
| Required Power Supply (DC) | +15VDC (± 5%) 100mA, -15VDC (± 5%) 150mA | ||
| or +24VDC (± 10%) ≤180mA (MFM would be ≤100mA) | |||
| Joint | 1/4VCR | ||
| Mounting Posture | Free | ||
| Weight | Approx. 800g | Approx. 550g | |
(1) The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
(2) The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
(3) The operating differential pressure may differ depending on specifications.
(4) Pressure condition would be needed when you order.
Advantages and Disadvantages
| Advantages | Disadvantages |
|---|---|
| High Accuracy & Stability: Provides precise and stable mass flow measurement and control, essential for critical processes. | Gas Purity Requirement: Requires gases to be dry, clean, and free of corrosive components, which might necessitate pre-filtration. |
| Fast Response Time: Rapid response (≤ 1 second) ensures quick adjustments to flow changes, improving process control dynamics. | Limited Flow Range: While versatile, the flow range from 10 SCCM to 5 SLM may not cover all very high or very low flow applications. |
| Broad Application Scope: Suitable for a wide array of industries including semiconductors, biotechnology, and various production systems. | Calibration Dependent for Non-Listed Gases: Gases not explicitly listed require calibration to N2 equivalent, which can add complexity. |
| Metal Sealing: Ensures superior leak integrity, crucial for handling expensive or hazardous gases and maintaining process purity. | Operating Differential Pressure Specificity: The operating differential pressure varies by gas (e.g., Ar, CO2), requiring careful consideration during setup. |
| Flexible I/O Options: Supports both 0-5VDC and 4-20mA signals, offering compatibility with diverse control systems. | Temperature Sensitivity for Accuracy: While operating from 5-50°C, guaranteed accuracy is only within 15-35°C, potentially requiring temperature control in extreme environments. |
| Digital Communication (RS485): Enables integrated digital control and monitoring via RS485 with rotary-switch address setting. | Specific Power Supply Requirements: Requires specific DC power supplies (+/-15VDC or +24VDC) which may need dedicated power infrastructure. |
| RoHS & CE Compliance: Meets international environmental and safety standards, assuring quality and regulatory adherence. | |
| User-Friendly Gas Selection: Rotary switch for quick selection of pre-registered gases. |
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