EXE-FLOWTM was commercialized “Exact measurement” and “Excellent function as a concept. This is covered from a small flow rate (F.S.10sccm) to a large flow rate (F.S.200slm) and the 11 flow ranges are ready as s standard stock.
Feature
- Lower cost model with newly developed high-grade sensor
- Compact and lightweight、24CDC drive.
- RS485 communication is the standard spec.
- Compliant to RoHS and CE marked.
- Easy operation with indicator.
- Instant and totalized flow rate indication
- Change of gas type
- Conversion factor setting
- Upper or lower alarm setting
- Change of the unit of flow range, etc.
- Accurate flow measurement and Excellent function
- Full scale 10sccm to 200SLM
- 11 Range standard stock for fast delivery
- Single power supply connection
Another Article: |
Specification
| Sensor type | Thermal (EX sensor) | ||
| Flow range(N2) | 10 /50 /100 /500SCCM 1 /5 /10 /20SLM | 50 /100 /200SLM | |
| Applicable gases(*1) | N2(Air, H2, He, Ar, O2, CO2, and C.F.) | N2(Air, Ar, and C.F.) | |
| Response | within 2sec | ||
| Accuracy(*2) | ± 1.0%F.S. (25℃ ) | ± 1.5%F.S.(25℃ ) | |
| Temperature coefficient | ± 0.2%F.S./℃ (15 ~ 35℃ ) ※ 200SLM ± 0.4%F.S./℃ | ||
| Repeatability | ± 0.2%F.S. | ||
| Proof pressure | 980 k Pa(G) | ||
| Working Temp. | 5 ~ 50℃ | ||
| Allowable storage temp. | -10 ~ 60℃ | ||
| Materials of a gas contact part | SUS316, SUS316L, PTFE, FKM (optional NBR,CRP) | ||
| Electrical connection | DC power plug and D-sub 9 pin male | ||
| Digital communication | RS485(MODBUS protocol, RTU mode) | ||
| Required power supply (DC) | 24VDC( ± 10%) 100mA | ||
| Joint | 1/4F900 (standard) | 3/8F900 (standard) | |
| Needle valve (option) | MODEL2412 | MODEL2412D | |
| Signal | Event output | 2 x NPN open collector output, integrating pulse output (Maximum rating DC30V 50mA) | |
| Flow output(*3) | ① 4 ~ 20mA ② 0 ~ 5V ③ 1 ~ 5V | ||
| Weight | Approx. 600g (without fittings) | Approx. 700g (without fittings) | |
Datasheet: KOFLOC EX-700 Digital Mass Flow Meter

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