Kofloc Mass Flow Controller/Mass Flow Meter With Indicator MODEL D8500 SERIES

Mass Flow Controller/Mass Flow Meter With Indicator
MODEL D8500 SERIES

This mass flow controller/meter driven by a 24 VDC power supply has been developed as successor to the MODEL 8300. The view point change function of the display unit and the pattern setting function are unique to this model, and noise resistance has been improved dramatically. A sister model with a detachable display and setting unit is also available.




Features :

• The high-lift actuator allows this compact model to control a large flow rate.
• Equipped with a display and setting unit, this model can be operated by a 24 VDC power supply
• The RS232C/RS485 communication function and integration function are provided as standard equpment.
• The 14-bit  converter permits display and operation in 4-1/2 digits.
• Control of the flow rate of inflammable gas is possible, because the heat generating part of the sensor is not exposed to gas.
• There are no limitations on the mounting position that may be employed
• In addition to SV setting, five other patterns can be set.
• Auto zero and auto close functions are also standars.

Specification

Sensor typeThermal sensor
Valve typeNormally closed solenoid valve
Applicable gases*1N2, Air, H2, He, Ar, O2, CO2, etc.
Gases not specifically mentioned here are subject to calibration for N2 equivalent.)
Flow range*250 SCCM to 5 SLM and Over 5 SLM-20 SLM
Control range2 to 100% (F.S.)
Response*30–100% F.S. or more within 2 sec. *1
0–below 10% F.S. within 4 sec. *1
Accuracy*4±1.0%F.S. *2 (50 SCCM to 5 SLM) and ±1.5%F.S. *2(Over 5 SLM-20 SLM)
Repeatability±0.75%F.S.
Operating differential pressure*550–300 kPa (G) (50 SCCM to 5 SLM) and 100–300 kPa (G)(Over 5 SLM-20 SLM)
Inlet maximum pressure500kPa(G)or less
Proof pressure1000kPa(G)
External leak rate1.0 x 10-8 Pa·m3/sec or less *3
TemperatureWorking temp.5 to 45℃
Allowable operating humidity10 to 90% RH (without dew condensation)
Materials of the gas contact partSUS316L, PTFE, and magnetic stainless steel
Electrical connectionD-sub 9-pin, KFC standard (SEMI standard compliant), RJ-45 modular jacks (two)
Flow rate setting signal0 to 5 V DC (input impedance approx. 1 MΩ)
Flow rate output signal0 to 5 V DC (load resistance 10 KΩ)
Digital communicationAddress setting with RS485 rotary switch: up to 99 devices (9600 bps)
Required power supply (DC)+15 V DC (±5%), 150 mA; -15 V DC (±5%), 150 mA
Joint1/4 SWL, RC1/4, 1/4 VCR
Mounting postureNot specified
WeightApprox. 1000 g

(*1) The time required to reach the control flow ±2% F.S. from the fully closed state

(*2) With the standard pressure of 200 kPa (G) and the standard temperature of 20℃

(*3) Permeation is not included. The leakage by prolonged permeation shall not exceed 1 × 106 Pa・m3/sec.

(*4) The units of measurement vary with the full-scale flow. E.g.: With 1 SLM, the flows can be added up to 9999 9999 9.999 L.

(*5) For other joints, please contact us. (*6) The weight may slightly vary depending on the joint. (*7) These apply to the D8500MC mass flow controller.

Datasheet: KOFLOC General Catalog D8500

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