Kofloc D8500MM Series Mass Flow Meter With Indicator
Kofloc D8500MC Series Mass Flow Controller With Indicator
Features of Kofloc D8500 Series Mass Flow Meter/Controller :
• The high-lift actuator allows this compact model to control a large flow rate.• Equipped with a display and setting unit, this model can be operated by a 24 VDC power supply
• The RS232C/RS485 communication function and integration function are provided as standard equpment.
• The 14-bit converter permits display and operation in 4-1/2 digits.
• Control of the flow rate of inflammable gas is possible, because the heat generating part of the sensor is not exposed to gas.
• There are no limitations on the mounting position that may be employed
• In addition to SV setting, five other patterns can be set.
• Auto zero and auto close functions are also standars.
Specification
| Sensor type | Thermal sensor | |
| Valve type | Normally closed solenoid valve | |
| Applicable gases*1 | N2, Air, H2, He, Ar, O2, CO2, etc. Gases not specifically mentioned here are subject to calibration for N2 equivalent.) | |
| Flow range*2 | 50 SCCM to 5 SLM and Over 5 SLM-20 SLM | |
| Control range | 2 to 100% (F.S.) | |
| Response*3 | 0–100% F.S. or more within 2 sec. *1 0–below 10% F.S. within 4 sec. *1 | |
| Accuracy*4 | ±1.0%F.S. *2 (50 SCCM to 5 SLM) and ±1.5%F.S. *2(Over 5 SLM-20 SLM) | |
| Repeatability | ±0.75%F.S. | |
| Operating differential pressure*5 | 50–300 kPa (G) (50 SCCM to 5 SLM) and 100–300 kPa (G)(Over 5 SLM-20 SLM) | |
| Inlet maximum pressure | 500kPa（G）or less | |
| Proof pressure | 1000kPa（G） | |
| External leak rate | 1.0 x 10-8 Pa·m3/sec or less *3 | |
| Temperature | Working temp. | 5 to 45℃ |
| Allowable operating humidity | 10 to 90% RH (without dew condensation) | |
| Materials of the gas contact part | SUS316L, PTFE, and magnetic stainless steel | |
| Electrical connection | D-sub 9-pin, KFC standard (SEMI standard compliant), RJ-45 modular jacks (two) | |
| Flow rate setting signal | 0 to 5 V DC (input impedance approx. 1 MΩ) | |
| Flow rate output signal | 0 to 5 V DC (load resistance 10 KΩ) | |
| Digital communication | Address setting with RS485 rotary switch: up to 99 devices (9600 bps) | |
| Required power supply (DC) | +15 V DC (±5%), 150 mA; -15 V DC (±5%), 150 mA | |
| Joint | 1/4 SWL, RC1/4, 1/4 VCR | |
| Mounting posture | Not specified | |
| Weight | Approx. 1000 g | |
(*1) The time required to reach the control flow ±2% F.S. from the fully closed state
(*2) With the standard pressure of 200 kPa (G) and the standard temperature of 20℃
(*3) Permeation is not included. The leakage by prolonged permeation shall not exceed 1 × 106 Pa・m3/sec.
(*4) The units of measurement vary with the full-scale flow. E.g.: With 1 SLM, the flows can be added up to 9999 9999 9.999 L.
(*5) For other joints, please contact us. (*6) The weight may slightly vary depending on the joint. (*7) These apply to the D8500MC mass flow controller.
Datasheet: KOFLOC General Catalog D8500